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Company profile

Hiden Analytical

Manufactures mass spectrometers and plasma diagnostics for semiconductor process analysis in Warrington.

Company overview

Hiden Analytical designs and manufactures quadrupole mass spectrometers and plasma diagnostic instruments at its headquarters on Europa Boulevard in Warrington, Cheshire. For the semiconductor industry, its instruments are used for residual-gas analysis, process-gas monitoring, plasma characterisation and etch-endpoint detection across processes including atomic layer deposition, molecular beam epitaxy, chemical vapour deposition and plasma etching. The product range extends to secondary-ion mass spectrometry surface analysers and Langmuir probes for plasma diagnostics. These tools support contamination control and process understanding in both semiconductor research and production environments. Founded in 1981, the company remains based in Warrington, where it designs, builds and supports its instruments for customers worldwide.

Semiconductor activity

Primary capability: Metrology / Inspection.

Technologies and capabilities

  • Quadrupole mass spectrometry
  • Residual-gas analysis
  • Plasma diagnostics
  • SIMS surface analysis
  • Langmuir probes

Residual-gas analysers; Plasma characterisation tools; Etch-endpoint detection; SIMS analysers

Markets served

  • Semiconductor manufacturing
  • Semiconductor research
  • Vacuum processes
  • Surface science

UK presence

Warrington, North West. Part of the North West cluster.

Sources and verification