Company profile
Oxford Instruments
UK instrumentation group whose plasma technology business supplies etch and deposition equipment used in compound semiconductor and research fabrication.
Company overview
Oxford Instruments provides high-technology equipment and services for industrial and research applications. Within the semiconductor supply chain, the company is an equipment supplier, providing systems for key fabrication processes. Its products include plasma and ion beam tools for deposition and etching, such as Plasma Enhanced Chemical Vapour Deposition (PECVD), Atomic Layer Deposition (ALD), Inductively Coupled Plasma Etching (ICP RIE), and Deep Silicon Etching (DSiE). It also develops and manufactures a wide range of advanced analytical and imaging instrumentation used for materials characterisation and process control, including atomic force and electron microscopes. Key end markets include semiconductors, data storage, quantum technologies, and photonics. A publicly listed company, Oxford Instruments operates globally, offering support services, upgrades, and training for its installed base.
Semiconductor activity
Primary capability: Semiconductor Manufacturing Equipment. Supply-chain role: Manufacturing equipment, Metrology & inspection, Services & support.
Technologies and capabilities
- Plasma Enhanced Chemical Vapour Deposition (PECVD)
- Inductively Coupled Plasma Chemical Vapour Deposition (ICPCVD)
- Atomic Layer Deposition (ALD)
- Ion Beam Deposition (IBD)
- Inductively Coupled Plasma Etching (ICP RIE)
- Reactive Ion Etching (RIE)
- Deep Silicon Etching (DSiE)
- Atomic Layer Etching (ALE)
- Ion Beam Etching (IBE)
- Atomic Force Microscopy (AFM)
- Electron microscopy
- Raman microscopy
Deposition tools (PECVD, ICPCVD, ALD, IBD); Etch tools (ICP RIE, RIE, DSiE, ALE, IBE); Atomic force microscopes; Electron microscopy detectors & software (EBSD, EDS); Raman microscopes; X-ray sources and cameras; Low temperature solutions (dilution fridges); Scientific imaging cameras; 3D/4D image analysis software; Service contracts; Upgrades and spares; Training and application support
Markets served
- Semiconductors
- Microelectronics
- Data Storage
- Quantum Technologies
- Photonics
- Advanced Manufacturing
- Automotive & Aerospace
- Bio Imaging & Life Science
- Energy Generation & Storage
- Research
UK presence
Abingdon, South East. Part of the Thames Valley cluster.